炭素技术

建立了大尺寸化学气相沉积炉的三维简化模型，采用计算流体力学方法仿真模拟了物料摆放方式、分气工装及温度场对流场的影响规律。结果表明:分气工装对原料气存在阻挡作用，进气后产生漩涡且速度分布不均匀;原料气在炉腔中部沿竖直方向呈现多级速度梯度，其他区域流速较为均匀;通过2种产品摆放方式与3种分气工装交叉组合形成6种装炉模型，其中采用产品摆放方式(1)与分气工装Ⅲ组合的C装炉模型时，沉积炉内各横截面流场均匀性指数最高，流场分布最均匀;引入温度场后气体主要向沉积炉中心流动，气体流速有明显增加，呈现出较好的速度均匀性。

In this paper,a three-dimensional simplified model of large scale CVD furnace was established,and the effects of material arrangement,gas separation equipment and temperature field on flow field were simulated by computational fluid dynamics. The results show that the gas separation tool has a blocking effect on the raw gas accompanied by vortex generation,and the velocity distribution is not uniform; after air intake; the raw gas presents a multi-stage velocity gradient along the vertical direction in the middle of the furnace chamber,and the flow rate in other areas is more uniform; six furnace-loading models were formed through the cross combination of 2 product placement methods and 3 gas distribution fixtures. Among them,when using the C furnace-loading model,which is a combination of product placement method(1) and gas distribution fixture Ⅲ,the uniformity index of the flow field across each cross-section in the deposition furnace is the highest,and the flow field distribution is the most uniform; after the introduction of temperature field,the gas mainly flows to the center of the deposition furnace,and the gas velocity increases obviously and presents a better velocity uniformity.